Planarizing and polishing spin coated polyimide
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Spin-on Polyimide Surfaces Without DefectsSpin coated polyimide may be planarized and polished to give a defect free surface for improved lithography processing.Polyimide coatings applications:
There are many benefits from using planarized polyimide coatings. By planarizing polyimide coatings, applied as liquid onto a substrate by:
the surface will be polished to a near defect free level for better functioning as a dielectric and will provide improved yield in polyimide patterning applications. Return to Home Page: Polyimide applications and polyimide properties
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